Semiconductors Supply Chain
Wafer Cleaning Tools
Equipment (enabled-by)
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Semiconductors›Equipment (enabled-by)
Wafer Cleaning Tools
Single-wafer and batch cleaning systems between process steps. SCREEN (JP) leads; a distinct specialist population, so its own equipment node under the granularity test.
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Equipment: enables these stages
Suppliers at this stage
ACM Research
Fremont, CA (Shanghai R&D/mfg) · US · Single-wafer wet cleaning, electroplating, and advanced packaging cleaning (Ultra C Tahoe)
AP&S GmbH
Cologne · DE · Single-wafer and batch wet-process/wet-bench cleaning systems for semiconductor, MEMS and microstructuring
Applied Materials
Santa Clara, CA · US · PVD, CVD, ALD, etch, and integrated materials solutions
Kingsemi
Suzhou · CN · Copper Foil| Wet processing and wafer cleaning equipment, track/coater-developer systems
Lam Research
Fremont, CA · US · Plasma etch, ALD, CVD deposition, and wafer cleaning
Metronics Semiconductor Equipment GmbH
Breisach am Rhein · DE · Megasonic/ultrasonic wafer and substrate cleaning and drying systems, quartzware, wet-bench components
Modutek Corporation
San Jose, CA · US · Wet bench systems, wafer etch/clean stations (RCA, SC1/SC2, piranha, megasonic, ozone)
RENA Technologies GmbH
Gütenbach (Black Forest) · DE · Single-wafer and batch wet cleaning/etching/drying systems (Vanguard platform)
Samco Inc.
Kyoto · JP · PECVD, ALD, plasma etch systems
Scientech Corporation
Hsinchu · TW · Wet bench (WS series) and single-wafer wet process (Polar series) cleaning/etch equipment, temporary bonding/debonding, panel-level packaging wet process, wafer reclaim
SCREEN Holdings (SCREEN Semiconductor Solutions)
Kyoto · JP · Single-wafer and batch wafer cleaning systems
SEMES Co., Ltd.
Cheonan · KR · Dry etch equipment, photo-track (coater/developer) equipment
SEMSYSCO GmbH
Gratkorn · AT · Single-wafer (TRITON) and batch (GALAXY) wet cleaning/plating platforms for advanced packaging
Shibaura Mechatronics
Yokohama · JP · Wet/dry wafer cleaning and etch equipment
Taiwan Supercritical Technology Co., Ltd.
Unknown · TW · Glass/wafer wet-bench cleaning systems; supercritical CO2 wafer cleaning technology
Tokyo Electron (TEL)
Tokyo · JP · Etch, thermal processing, deposition (batch ALD), and coat/develop
Xinyuan Micro (芯源微 / SCIA Systems)
Shenyang · CN · Front-end single-wafer spin scrubber cleaning equipment; also coat/develop track systems
Zhichun Technology (至纯科技)
Shanghai · CN · 8-12 inch single-wafer and batch (tank-type) wet cleaning equipment, down to 28nm node
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