Semiconductors Supply Chain
Metrology & Inspection
Equipment (enabled-by)
Back to all stagesCLEARCLEARCLEARCLEARBLOCKEDCLEARCLEARCLEARCLEARCAUTIONCLEARCLEARCLEARCLEARCLEARCAUTIONBLOCKEDBLOCKEDCLEARCLEAR Contact
Semiconductors›Equipment (enabled-by)
Metrology & Inspection
Defect inspection and measurement systems used throughout the fab. KLA (US) ~55-63%, Hitachi High-Tech (JP), Onto Innovation (US), Nova (IL).
Suppliers
20
CLEAR
15
CAUTION
2
FLAGGED
0
BLOCKED
3
Process flow
Equipment: enables these stages
Suppliers at this stage
Bruker Corporation (Nano Surfaces & Metrology)
Billerica, MA · US · Atomic force microscopy (AFM), automated X-ray metrology, photomask repair/cleaning for semiconductor process control
Camtek Ltd.
Migdal HaEmek · IL · Automated optical inspection for advanced packaging and wafer-level inspection
Carl Zeiss SMT GmbH
Oberkochen · DE · 3D metrology/inspection workstations (FIB-SEM), ZEISS MultiSEM multi-beam SEM, semiconductor manufacturing optics
Comet Yxlon (Comet Holding AG)
Flamatt · CH · X-ray and CT inspection systems for advanced packaging (TSV, solder bump, 3D IC defect detection)
Dongfang Jingyuan (East Crystal Source / EBTC)
Beijing · CN · Electron-beam defect inspection (EBI), CD-SEM critical-dimension measurement
Hitachi High-Tech Corporation
Tokyo · JP · Critical-dimension SEM and inspection systems
Horiba, Ltd.
Kyoto · JP · Automated wafer inspection/metrology (Xtrology thin-film inspection, spectroscopic ellipsometry, Raman/photoluminescence wafer imaging, reticle particle detection)
JEOL Ltd.
Tokyo · JP · Electron-beam lithography (mask writers) and SEM/CD-SEM based metrology and failure-analysis instruments
KLA Corporation
Milpitas, CA · US · Defect inspection and process-control metrology
Koh Young Technology Inc.
Seoul · KR · 3D SPI/AOI inspection, semiconductor advanced-packaging metrology (Meister series)
Lasertec Corporation
Yokohama · JP · EUV mask blank/pattern inspection (actinic), wafer inspection and metrology systems
Nextin Inc.
Hwaseong · KR · Wafer defect/particle inspection systems (front-end)
Nidec Advance Technology Corporation
Kawasaki · JP · Wafer/die/package optical 2D-3D inspection systems and probe cards (MEMS, vertical, cantilever), incl. power-semiconductor inspection
Nova Ltd.
Rehovot · IL · Optical critical dimension and materials metrology
Onto Innovation
Wilmington, MA · US · Optical metrology, inspection, and lithography process control
Park Systems Corp.
Suwon · KR · Atomic force microscopy (AFM) for front-end/back-end metrology, CMP/wafer-edge metrology, EUV mask repair
Shanghai Ruili (Raintree) Scientific Instruments
Shanghai · CN · Optical film measurement (thickness, refractive index, composition, stress) and defect inspection
Skyverse Technology (中科飞测)
Suzhou · CN · Patterned/patternless wafer defect inspection, 3D topography measurement, film thickness measurement
Thermo Fisher Scientific (Semiconductor)
Waltham, MA · US · Electron microscopy and materials characterization for semiconductor R&D/fab
UnitySC (Unity Semiconductor SAS)
Montbonnot-Saint-Martin · FR · Optical metrology and defect inspection equipment for advanced packaging, TSV, hybrid bonding, HBM, and compound-semiconductor wafers
Building a semiconductors BOM?
Upload your bill of materials. Verdex runs CHIPS screening on every supplier.