Semiconductors Supply Chain
Lithography Tools
Equipment (enabled-by)
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Semiconductors›Equipment (enabled-by)
Lithography Tools
Scanners and steppers that project mask patterns onto wafers. ASML (NL) — 100% of EUV; Nikon and Canon (JP) for DUV. Equipment node: attaches to wafer fabrication via enabled-by (ontology Amendment A1), never as an input.
Suppliers
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Process flow
Equipment: enables these stages
Suppliers at this stage
AMIES Technology (Shanghai AMIES)
Shanghai · CN · DUV stepper lithography systems (commercialization arm)
ASML
Veldhoven · NL · EUV and DUV lithography scanners
Canon Inc.
Tokyo · JP · i-line and KrF lithography tools for power devices, MEMS, display drivers
EV Group (EVG)
St. Florian am Inn · AT · Nanoimprint lithography, mask aligners, wafer bonders
Nikon Corporation
Tokyo · JP · DUV lithography (i-line, KrF, ArF) steppers/scanners
Shanghai Micro Electronics Equipment (SMEE)
Shanghai · CN · DUV lithography (KrF, ArF, ArF immersion) for 90nm-28nm nodes
Shanghai Yuliangsheng Technology
Shanghai · CN · 28nm-class DUV lithography systems
SiCarrier (Shenzhen SiCarrier Technologies)
Shenzhen · CN · Lithography (reportedly 28nm-class), plus deposition/etch tools
SUSS MicroTec
Garching (Munich) · DE · Mask aligners, projection lithography, maskless exposure for MEMS/specialty
Veeco Instruments (incl. Ultratech)
Plainview, NY · US · Advanced-packaging lithography and laser processing systems (ex-Ultratech)
Zetop Technologies
Changchun · CN · EUV optics / lithography R&D
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