Semiconductors Supply Chain
Deposition, Etch & Implant Tools
Equipment (enabled-by)
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Semiconductors›Equipment (enabled-by)
Deposition, Etch & Implant Tools
Deposition (CVD/ALD/PVD), plasma etch, and ion-implant systems. Applied Materials (US), Lam Research (US), Tokyo Electron (JP), ASM International (NL), Kokusai (JP), Axcelis (US).
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View all 30 →Aixtron SE
Herzogenrath · DE · MOCVD (metalorganic chemical vapor deposition) systems for compound semiconductors, power/RF GaN and SiC epitaxy
AMEC (Advanced Micro-Fabrication Equipment Inc.)
Shanghai · CN · Plasma etch tools (logic and memory)
Amtech Systems, Inc. (Tempress Systems)
Tempe, Arizona · US · Horizontal diffusion/LPCVD furnace systems (doping, annealing) sold under Tempress brand, used in semiconductor and solar-cell manufacturing
Applied Materials
Santa Clara, CA · US · PVD, CVD, ALD, etch, and integrated materials solutions
ASM International
Almere · NL · ALD, epitaxy, and PECVD deposition systems
Axcelis Technologies
Beverly, MA · US · Ion implantation systems
Beijing SEMICORE ZKX Electronics Equipment Co., Ltd.
Beijing · CN · Ion implanters (medium-current, high-current, high-energy, SiC solutions) for IC and compound semiconductor fabrication
Eugene Technology
Icheon · KR · Atomic layer deposition (ALD) equipment
Evatec AG
Trübbach · CH · PVD/PECVD thin-film deposition systems (BAK, CLUSTERLINE) for advanced packaging, power, MEMS, optoelectronics
IBS - Ion Beam Services
Peynier · FR · Ion implanters (MAXion, FLEXion, PULSion) for 4-inch to 12-inch wafers, power/RF/imaging applications
Jusung Engineering
Yongin · KR · PECVD and ALD thin-film deposition equipment
Kingstone Semiconductor Joint Stock Company Ltd.
Shanghai · CN · Ion beam implantation equipment for semiconductor, PV and OLED manufacturing
Kokusai Electric
Tokyo · JP · Batch ALD/CVD (vertical furnace) deposition systems
Lam Research
Fremont, CA · US · Plasma etch, ALD, CVD deposition, and wafer cleaning
NAURA Technology Group
Beijing · CN · Etch, PVD, CVD, thermal processing, cleaning/epitaxy
Nissin Ion Equipment Co., Ltd.
Kyoto · JP · Ion implanters (medium-current, high-current, power device, SiC/GaN)
Oxford Instruments Plasma Technology
Bristol · GB · Plasma/ion-beam etch and deposition systems (ICP RIE, PECVD, ALD, IBE) for compound semiconductor, MEMS and photonics
Plasma-Therm LLC
St. Petersburg, Florida · US · ICP/IBE plasma etch, dicing, and ion-beam deposition systems for MEMS, compound semiconductor and photonics
PSK Holdings
Hwaseong · KR · Dry strip and etch equipment
Revasum, Inc.
San Luis Obispo, California · US · CMP (chemical mechanical planarization) and wafer grinding/polishing systems, esp. for SiC and compound semiconductor substrates
Samco Inc.
Kyoto · JP · PECVD, ALD, plasma etch systems
SEMES Co., Ltd.
Cheonan · KR · Dry etch equipment, photo-track (coater/developer) equipment
Shenyang Piotech
Shenyang · CN · PECVD and ALD deposition tools
SiCarrier Industrial Machines
Shenzhen · CN · Etch, thin-film deposition (PVD, CVD, ALD, EPI)
SPTS Technologies Ltd
Newport, Wales · GB · Etch, PVD, CVD and MVD wafer-processing tools for MEMS, advanced packaging, RF and power devices
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