Semiconductors Supply Chain
CMP Slurries & Pads
Fab Materials
Back to all stagesCLEARCLEARCLEARCLEARCAUTIONCAUTIONCLEARCLEARCAUTION Contact
Semiconductors›Fab Materials
CMP Slurries & Pads
Chemical-mechanical planarization consumables, used up per wafer. Slurry: Entegris (US) ~40%, Fujimi (JP), Resonac (JP); pads: DuPont (US) >50%.
Suppliers
9
CLEAR
6
CAUTION
3
FLAGGED
0
BLOCKED
0
Process flow
Upstream inputs
None: first stage.
Downstream outputs
Suppliers at this stage
3M
Saint Paul, MN · US · CMP materials solutions
AGC Inc. (Asahi Glass)
Tokyo · JP · Solar Glass| EUV mask blanks (integrated glass-to-coating)
Entegris
Billerica, MA · US · Contamination control, filtration, wet chemicals
Fujimi Incorporated
Kiyosu · JP · CMP slurry (FEOL dielectric, silicon wafer polish)
KC Tech
Cheonan · KR · CMP slurry (ceria STI, oxide)
Kumho Petrochemical
Seoul · KR · Binder| CMP slurry (oxide, STI for memory)
Qnity Electronics
Wilmington, DE · US
Resonac Holdings (Showa Denko Materials)
Tokyo · JP · Anode Active Material (Graphite); Binder; Conductive Additive| Copper CMP slurry, advanced packaging
Soulbrain
Seongnam · KR · CMP slurry (tungsten, copper)
Building a semiconductors BOM?
Upload your bill of materials. Verdex runs CHIPS screening on every supplier.